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Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/11365

Title: An Electrostatic Zigzag Transmissive Micro-Optical Switch for MEMS Displays
Authors: Wang, Kerwin;Sinclair, Mike;Starkweather, Gary K.;B�hringer, Karl F.
Contributors: 機電工程學系
Date: 2007-02
Issue Date: 2012-06-06T01:41:29Z
Publisher: IEEE
Abstract: This paper presents the design and characterization of the zigzag transmissive microoptical switch. It consists of a highly space-efficient zigzag electrostatic actuator and opaque shutter pair, which cover the optical channel in order to modulate a focused incident light beam. The novel zigzag design increases the electrostatic force and extends the stable travel range of the electrostatic actuator. By adjusting the dimensions of the zigzag, it can operate both under digital and analog optical switching. The real-time shutter motions have been tested by a laser-integrated
microscope. Experimental data demonstrate that a zigzag electrostatic actuator of 47 m 160 m size can achieve a maximum static lateral displacement of 10 m (18 m total opening by a shutter pair) at 38 V. Depending on their design, zigzag devices have a mechanical resonance frequency of up to 38.6 kHz with response time less than 20 s and lifetime above 7:6 109 cycles.
Relation: IEEE Journal of Microelectromechanical Systems, 16(1): 140-154
Appears in Collections:[機電工程學系] 期刊論文

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