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Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/11371

Title: Folded and Tapered-Beam Thermal Actuator
Authors: Michael Sinclair;Wang, Kerwin
Contributors: 機電工程學系
Date: 2003-05
Issue Date: 2012-06-06T01:42:43Z
Relation: SPIE First International Symposium on Microtechnologies for the New Millenium, Conference on Smart Sensors, Actuators, and MEMS (EMT101), Maspalomas, Gran Canaria (Canary Islands), Spain, May 19-21, 2003
Appears in Collections:[機電工程學系] 會議論文

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