This paper presents likely the world’s smallest electrostatic visible light highly space-efficient transmissive microoptical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150μm×150μm spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47μm×160μm size can achieve a maximum static lateral displacement of 10μm at 38V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6kHz.
The 12th International Conference on Solid-State Sensors and Actuators (Transducers ' 03), Boston, MA, June 8-12, 2003