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NCUEIR > College of Engineering > Department of Mechatronics Engineering > Proceedings > Item 987654321/11372

Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/11372

Title:	Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system
Authors:	Wang, Kerwin;Karl F. Bohringer;Mike Sinclair;Gary Starkweather
Contributors:	機電工程學系
Keywords:	Electrostatic actuator;Transmissive;Opticswitch;Space-efficient;Display;MOEMS
Date:	2003-06
Issue Date:	2012-06-06T01:42:46Z
Publisher:	IEEE
Abstract:	This paper presents likely the world’s smallest electrostatic visible light highly space-efficient transmissive microoptical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150μm×150μm spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47μm×160μm size can achieve a maximum static lateral displacement of 10μm at 38V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6kHz.
Relation:	The 12th International Conference on Solid-State Sensors and Actuators (Transducers ' 03), Boston, MA, June 8-12, 2003
Appears in Collections:	[Department of Mechatronics Engineering] Proceedings

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