National Changhua University of Education Institutional Repository : Item 987654321/11372
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题名: Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system
作者: Wang, Kerwin;Karl F. Bohringer;Mike Sinclair;Gary Starkweather
贡献者: 機電工程學系
关键词: Electrostatic actuator;Transmissive;Opticswitch;Space-efficient;Display;MOEMS
日期: 2003-06
上传时间: 2012-06-06T01:42:46Z
出版者: IEEE
摘要: This paper presents likely the world’s smallest electrostatic visible light highly space-efficient transmissive microoptical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150μm×150μm spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47μm×160μm size can achieve a maximum static lateral displacement of 10μm at 38V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6kHz.
關聯: The 12th International Conference on Solid-State Sensors and Actuators (Transducers ' 03), Boston, MA, June 8-12, 2003
显示于类别:[機電工程學系] 會議論文

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