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NCUEIR > College of Engineering > Department of Mechatronics Engineering > Proceedings > Item 987654321/11373

Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/11373

Title:	Time-Multiplexed Plasma Etching of High Numerical Aperture Paraboloidal Micromirror Arrays
Authors:	Wang, Kerwin;Bohringer, Karl F.
Contributors:	機電工程學系
Date:	2003-07
Issue Date:	2012-06-06T01:42:48Z
Abstract:	This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch.
Relation:	The 5th Pacific Rim Conference on Lasers and Electro-Optics (CLEO/Pacific Rim 2003), Taipei, Taiwan
Appears in Collections:	[Department of Mechatronics Engineering] Proceedings

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