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Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/11374

Title: Low Voltage and Pull-in State Adjustable Dual Servo Scanning Mirror
Authors: Wang, Kerwin;Bohringer, Karl F.;Sinclair, Mike
Contributors: 機電工程學系
Date: 2003-07
Issue Date: 2012-06-06T01:42:50Z
Abstract: This paper reports a new dual-servo-scanning-mirror, which makes use of thermal and electrostatic driving principles. By tuning loading of the thermal and electrostatic actuator individually, one can increase the scanning-angle of the mirror.
Relation: The 5th Pacific Rim Conference on Lasers and Electro-Optics (CLEO/Pacific Rim 2003), Taipei, Taiwan
Appears in Collections:[Department of Mechatronics Engineering] Proceedings

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