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請使用永久網址來引用或連結此文件: http://ir.ncue.edu.tw/ir/handle/987654321/11375

題名: Micro-optical Components for a MEMS Integrated Display
作者: Wang, Kerwin;Wei, Khye-Suian;Sinclair, Mike;Bohringer, Karl F.
貢獻者: 機電工程學系
日期: 2003-12
上傳時間: 2012-06-06T01:42:52Z
摘要: This paper summarizes the results from our previously published researches on reflective and transmissive optical switches for MEMS integrated display systems. They include a dual-servoscanning mirror and a transmissive zigzag electrostatic micro-optical switch. It also introduces a new
process for making a microlens array. These are three key components for a MEMS display system.
關聯: The 12th International Workshop on The Physics of Semiconductor Devices (IWPSD), Chennai, India
顯示於類別:[機電工程學系] 會議論文

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