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http://ir.ncue.edu.tw/ir/handle/987654321/11375
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Title: | Micro-optical Components for a MEMS Integrated Display |
Authors: | Wang, Kerwin;Wei, Khye-Suian;Sinclair, Mike;Bohringer, Karl F. |
Contributors: | 機電工程學系 |
Date: | 2003-12
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Issue Date: | 2012-06-06T01:42:52Z
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Abstract: | This paper summarizes the results from our previously published researches on reflective and transmissive optical switches for MEMS integrated display systems. They include a dual-servoscanning mirror and a transmissive zigzag electrostatic micro-optical switch. It also introduces a new process for making a microlens array. These are three key components for a MEMS display system. |
Relation: | The 12th International Workshop on The Physics of Semiconductor Devices (IWPSD), Chennai, India |
Appears in Collections: | [機電工程學系] 會議論文
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