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Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/11375

Title: Micro-optical Components for a MEMS Integrated Display
Authors: Wang, Kerwin;Wei, Khye-Suian;Sinclair, Mike;Bohringer, Karl F.
Contributors: 機電工程學系
Date: 2003-12
Issue Date: 2012-06-06T01:42:52Z
Abstract: This paper summarizes the results from our previously published researches on reflective and transmissive optical switches for MEMS integrated display systems. They include a dual-servoscanning mirror and a transmissive zigzag electrostatic micro-optical switch. It also introduces a new
process for making a microlens array. These are three key components for a MEMS display system.
Relation: The 12th International Workshop on The Physics of Semiconductor Devices (IWPSD), Chennai, India
Appears in Collections:[機電工程學系] 會議論文

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