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|Title: ||Micro-optical Components for a MEMS Integrated Display|
|Authors: ||Wang, Kerwin;Wei, Khye-Suian;Sinclair, Mike;Bohringer, Karl F.|
|Issue Date: ||2012-06-06T01:42:52Z
|Abstract: ||This paper summarizes the results from our previously published researches on reflective and transmissive optical switches for MEMS integrated display systems. They include a dual-servoscanning mirror and a transmissive zigzag electrostatic micro-optical switch. It also introduces a new|
process for making a microlens array. These are three key components for a MEMS display system.
|Relation: ||The 12th International Workshop on The Physics of Semiconductor Devices (IWPSD), Chennai, India|
|Appears in Collections:||[機電工程學系] 會議論文|
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