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NCUEIR > College of Engineering > Department of Mechatronics Engineering > Proceedings > Item 987654321/11375

Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/11375

Title:	Micro-optical Components for a MEMS Integrated Display
Authors:	Wang, Kerwin;Wei, Khye-Suian;Sinclair, Mike;Bohringer, Karl F.
Contributors:	機電工程學系
Date:	2003-12
Issue Date:	2012-06-06T01:42:52Z
Abstract:	This paper summarizes the results from our previously published researches on reflective and transmissive optical switches for MEMS integrated display systems. They include a dual-servoscanning mirror and a transmissive zigzag electrostatic micro-optical switch. It also introduces a new process for making a microlens array. These are three key components for a MEMS display system.
Relation:	The 12th International Workshop on The Physics of Semiconductor Devices (IWPSD), Chennai, India
Appears in Collections:	[Department of Mechatronics Engineering] Proceedings

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