English  |  正體中文  |  简体中文  |  Items with full text/Total items : 6487/11649
Visitors : 28533278      Online Users : 604
RC Version 3.2 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Adv. Search

Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/11377

Title: Low-Voltage Large Angular Displacement Electrostatic Scanning Micromirror Using Floating Slider Mechanism
Authors: Wang, Kerwin;Sinclair, Mike;Bohringer, Karl F.
Contributors: 機電工程學系
Date: 2004-01
Issue Date: 2012-06-06T01:42:57Z
Publisher: IEEE
Abstract: This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial
tilting angles of the mirrors range between 6.So-13S0. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4mtorr).
Relation: IEEE Conference on Micro Electro Mechanical Systems (MEMS), Maastricht, Holland, Jan. 25-29, 2004: 506-509
Appears in Collections:[機電工程學系] 會議論文

Files in This Item:

File SizeFormat

All items in NCUEIR are protected by copyright, with all rights reserved.


DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback