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Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/11377

Title: Low-Voltage Large Angular Displacement Electrostatic Scanning Micromirror Using Floating Slider Mechanism
Authors: Wang, Kerwin;Sinclair, Mike;Bohringer, Karl F.
Contributors: 機電工程學系
Date: 2004-01
Issue Date: 2012-06-06T01:42:57Z
Publisher: IEEE
Abstract: This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial
tilting angles of the mirrors range between 6.So-13S0. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4mtorr).
Relation: IEEE Conference on Micro Electro Mechanical Systems (MEMS), Maastricht, Holland, Jan. 25-29, 2004: 506-509
Appears in Collections:[機電工程學系] 會議論文

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