National Changhua University of Education Institutional Repository : Item 987654321/11377
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题名: Low-Voltage Large Angular Displacement Electrostatic Scanning Micromirror Using Floating Slider Mechanism
作者: Wang, Kerwin;Sinclair, Mike;Bohringer, Karl F.
贡献者: 機電工程學系
日期: 2004-01
上传时间: 2012-06-06T01:42:57Z
出版者: IEEE
摘要: This paper presents a floating slider mechanism to achieve large scanning angular displacements with low voltage electrostatic mirrors. It can amplify the mirror angular displacement from the movement of bimorph electrostatic actuators. Depending on the actuator designs, the initial
tilting angles of the mirrors range between 6.So-13S0. The slider mechanism has reliable performance after 6.9 billion cycles under continuous operation in vacuum (4mtorr).
關聯: IEEE Conference on Micro Electro Mechanical Systems (MEMS), Maastricht, Holland, Jan. 25-29, 2004: 506-509
显示于类别:[機電工程學系] 會議論文

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