National Changhua University of Education Institutional Repository : Item 987654321/11378

English | 正體中文 | 简体中文 | Items with full text/Total items : 6507/11669
Visitors : 30017167 Online Users : 342

RC Version 3.2 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.

Scope Adv. Search

Login ‧ Upload ‧ Help ‧ About ‧ Administer

NCUEIR > College of Engineering > Department of Mechatronics Engineering > Proceedings > Item 987654321/11378

Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/11378

Title:	Self-assembly of Micro Pumps with High Uniformity in Performance
Authors:	Fang, Jiandong;Wang, Kerwin;Bohringer, Karl F.
Contributors:	機電工程學系
Date:	2004-06
Issue Date:	2012-06-06T01:43:01Z
Abstract:	In this paper we report a novel capillary-force-driven selfassembly technique which proceeds in an air environment. We demonstrate this technique for the self-assembly of piezoelectric driving elements (PZT) for diffuser valve micropumps: with the agitation of an orbital shaker, square PZT actuators self-align and mount to the hydrophilic trench binding sites with electric connections by heat curable lubricant oil and conductive physical contact between the PZT actuators and the substrate. 28 pumps are fabricated on a 4-inch bonded pyrex/silicon substrate. The resonance frequencies of all the pumps show high performance uniformity: the average is 80.1 kHz and standard deviation is 2.0 kHz. This technique provides fast, parallel and well-controlled bonding of bulk PZTs for micro pumps with yield ratio up to 100%.
Relation:	Solid State Sensor, Actuator, and Microsystems Workshop (Hilton Head'04), Hilton Head Island, SC
Appears in Collections:	[Department of Mechatronics Engineering] Proceedings

Files in This Item:

File	Size	Format
index.html	0Kb	HTML	611	View/Open