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Title: Low Temperature Molding for High Space Coverage Microlens Arrays
Authors: Wang, Kerwin;Bohringer, Karl F.
Contributors: 機電工程學系
Date: 2005-07
Issue Date: 2012-06-06T01:43:13Z
Publisher: IEEE
Abstract: This paper presents SF6/O2 plasma lens-mold-etching and low-temperature-molding to produce 100% coverage microlens arrays. The
methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.
Relation: International Conference on Quantum Electronics/ Pacific Rim Conference on Lasers and Electro-Optics 2005 (IQEC/CLEO-PR), Tokyo, Japan, July 14, 2005
Appears in Collections:[Department of Mechatronics Engineering] Proceedings

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