National Changhua University of Education Institutional Repository : Item 987654321/11390
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题名: Extend The Angular Displacement of A Thermal Actuated Scanning Mirror
作者: Wang, Kerwin;Cheng, Chien-Min
贡献者: 機電工程學系
关键词: Scanning micromirror;Thermal actuator
日期: 2008-06
上传时间: 2012-06-06T01:43:31Z
出版者: National Cheng Kung University
摘要: MEMS thermal actuators are known for their relatively high mechanical energy output for a given MEMS chip area, however, they are power consuming. This paper presents two novel actuating methods to achieve large scanning angular displacements with low driving voltage and power consumption. Experimental results show that these two driving methods can amplify the mirror angular displacement. Compared to our previous testing results the scanning angle is improved from 18o to 57.degree.. The pulling-up mechanism has reliable performance after 3.6*10/sup 7/ cycles under continuous operation.
關聯: The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, National Cheng Kung University, June 22-25, 2008
显示于类别:[機電工程學系] 會議論文

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