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http://ir.ncue.edu.tw/ir/handle/987654321/11395
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題名: | Deterministic Three-Dimensional Micro-Assembly in Parallel |
作者: | Lin, Huo-Chuan;Wang, Chia-Chung;Wang, Kerwin |
貢獻者: | 機電工程學系 |
關鍵詞: | micro-assembly;self-assembly;three-dimensional assembly;deterministic-assembly |
日期: | 2011-02
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上傳時間: | 2012-06-06T01:44:03Z
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出版者: | IEEE |
摘要: | This paper introduces a novel deterministic threedimensional micro-assembly method to tackle the difficulty of micro-part assembling at unstable equilibrium region. We design, characterize and manufacture an parallel assembly system, which is capable of connecting micro-parts from almost arbitrary direction into desired structures in batch processes. This paper also introduces a non-contact method to measurement the surface adhesion forces among parts, donor and receiver substrates. Five successive 3D micro-assembly processes have be tested with yield ratio investigation to demonstrate this technology. |
關聯: | The 6th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Kaohsiung, Taiwan, February 20-23, 2011 |
顯示於類別: | [機電工程學系] 會議論文
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