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Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/11395

Title: Deterministic Three-Dimensional Micro-Assembly in Parallel
Authors: Lin, Huo-Chuan;Wang, Chia-Chung;Wang, Kerwin
Contributors: 機電工程學系
Keywords: micro-assembly;self-assembly;three-dimensional assembly;deterministic-assembly
Date: 2011-02
Issue Date: 2012-06-06T01:44:03Z
Publisher: IEEE
Abstract: This paper introduces a novel deterministic threedimensional micro-assembly method to tackle the difficulty of micro-part assembling at unstable equilibrium region. We design, characterize and manufacture an parallel assembly system, which is capable of connecting micro-parts from almost arbitrary direction into desired structures in batch processes. This paper also introduces a non-contact method to measurement the surface
adhesion forces among parts, donor and receiver substrates. Five successive 3D micro-assembly processes have be tested with yield ratio investigation to demonstrate this technology.
Relation: The 6th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Kaohsiung, Taiwan, February 20-23, 2011
Appears in Collections:[機電工程學系] 會議論文

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