National Changhua University of Education Institutional Repository : Item 987654321/11395
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题名: Deterministic Three-Dimensional Micro-Assembly in Parallel
作者: Lin, Huo-Chuan;Wang, Chia-Chung;Wang, Kerwin
贡献者: 機電工程學系
关键词: micro-assembly;self-assembly;three-dimensional assembly;deterministic-assembly
日期: 2011-02
上传时间: 2012-06-06T01:44:03Z
出版者: IEEE
摘要: This paper introduces a novel deterministic threedimensional micro-assembly method to tackle the difficulty of micro-part assembling at unstable equilibrium region. We design, characterize and manufacture an parallel assembly system, which is capable of connecting micro-parts from almost arbitrary direction into desired structures in batch processes. This paper also introduces a non-contact method to measurement the surface
adhesion forces among parts, donor and receiver substrates. Five successive 3D micro-assembly processes have be tested with yield ratio investigation to demonstrate this technology.
關聯: The 6th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Kaohsiung, Taiwan, February 20-23, 2011
显示于类别:[機電工程學系] 會議論文


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