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NCUEIR > College of Engineering > Department of Mechatronics Engineering > Proceedings > Item 987654321/11397

Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/11397

Title:	Using a Canny-Edge-Detection Based Method to Characterize In-plane Micro-Actuators
Authors:	Cheng, Chao-Yu;Lin, Yan-Bo;Wang, Kerwin
Contributors:	機電工程學系
Keywords:	Automatic optical inspection;A OJ;Canny edge detection;Actuator, in-plane motion
Date:	2012-03
Issue Date:	2012-06-06T01:44:07Z
Publisher:	IEEE
Abstract:	This paper developed an automatic optical inspection (AOI) technology for characterizing the motion amplitude and the vibration mode shape of in-plane microactuators. The technology involves a multi-stage image process method. It includes an image contrast enhancement step and a Canny edge detection method. To evaluate this approach, a rotational electrostatic actuator has been prepared for testing. This actuator performed low contrast optical micrographs under first vibration mode. The testing result shows that the technology can handle low contrast microscopic images quite well. The suggested method successfully provides quantitative information to identify the vibration amplitudes and mode shape of the tested actuator with a space resolution of 0.46IlmipixeI.
Relation:	The 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Kyoto, Japan, March 5-8, 2012
Appears in Collections:	[Department of Mechatronics Engineering] Proceedings

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