English  |  正體中文  |  简体中文  |  Items with full text/Total items : 6487/11649
Visitors : 28592183      Online Users : 294
RC Version 3.2 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Adv. Search

Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/11942

Title: Fiber Laser Driven EUV Generation
Authors: Chang, Yu-Chung;Aghapi Mordovanakis;Hou, Kai-Chung;John Nees;Bixue Hou;Anatoly Maksimchuk;Gerard Mourou;Almantas Galvanauskas
Contributors: 電機工程學系
Date: 2005-05
Issue Date: 2012-07-03T01:49:58Z
Publisher: Optical Society of America
Abstract: Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.
Relation: Conference on Lasers and Electro-Optics (CLEO), May 22, 2005
Appears in Collections:[電機工程學系] 會議論文

Files in This Item:

File SizeFormat

All items in NCUEIR are protected by copyright, with all rights reserved.


DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback