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Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/11942

Title: Fiber Laser Driven EUV Generation
Authors: Chang, Yu-Chung;Aghapi Mordovanakis;Hou, Kai-Chung;John Nees;Bixue Hou;Anatoly Maksimchuk;Gerard Mourou;Almantas Galvanauskas
Contributors: 電機工程學系
Date: 2005-05
Issue Date: 2012-07-03T01:49:58Z
Publisher: Optical Society of America
Abstract: Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.
Relation: Conference on Lasers and Electro-Optics (CLEO), May 22, 2005
Appears in Collections:[電機工程學系] 會議論文

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