National Changhua University of Education Institutional Repository : Item 987654321/11942
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题名: Fiber Laser Driven EUV Generation
作者: Chang, Yu-Chung;Aghapi Mordovanakis;Hou, Kai-Chung;John Nees;Bixue Hou;Anatoly Maksimchuk;Gerard Mourou;Almantas Galvanauskas
贡献者: 電機工程學系
日期: 2005-05
上传时间: 2012-07-03T01:49:58Z
出版者: Optical Society of America
摘要: Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.
關聯: Conference on Lasers and Electro-Optics (CLEO), May 22, 2005
显示于类别:[電機工程學系] 會議論文

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