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Title: Effect of poling conditions on the out-of-plane displacement for a shear mode PZT actuator
Authors: Cheng, C. H.;Chen, S. C.;Young, S. W.;Sua, Y. R.;Lin, Yi- Cheng
Contributors: 機電工程系
Keywords: PZT;Poling;Shear mode;Actuator;FEM;Out-of-plane displacement
Date: 2006-02
Issue Date: 2012-07-05T07:10:18Z
Publisher: Elsevier B.V.
Abstract: A shear mode plate-shaped lead zirconate titanate (PZT) actuator for a novel actuating module in a microdroplet ejecting system was fabricated
and tested. A novel poling design with both poling electrodes on the same surface is proposed. The actuator is made with lateral polarization
parallel to the plane, in contrast to the conventional actuator with the polarization along the plate-thickness direction. Due to the requirement for
the excellent electromechanical coupling characteristics, the samples poled under various poling conditions were tested and compared to determine
the optimum conditions. The poling conditions, including the poling voltage, poling temperature and poling duration, affect the electromechanical
characteristic or output actuated displacement. The distribution of electric field in the sample during poling was simulated using commercial finite
element method (FEM) software to predict the appropriate poling voltage. Experimental results indicate that the optimum conditions are a poling
voltage of 7 kV, a poling temperature of 120 ◦C and a poling duration of 10 min. The sample with the optimum condition has the highest out-of-plane displacement of 400 nm under an actuating peak-to-peak voltage of 120Vpp.
Relation: Sensors and Actuators A, 126(2): 386-395
Appears in Collections:[機電工程學系] 期刊論文

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