National Changhua University of Education Institutional Repository : Item 987654321/12286
English  |  正體中文  |  简体中文  |  全文筆數/總筆數 : 6491/11663
造訪人次 : 24928890      線上人數 : 71
RC Version 3.2 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
搜尋範圍 進階搜尋


題名: Effect of Substrate Temperature on the Characterization of Molybdenum Contacts Deposited by DC Magnetron Sputtering
作者: Lin, Yi- Cheng;Yen, W. T.;Wang, L. Q.
貢獻者: 機電工程系
日期: 2012-02
上傳時間: 2012-07-05T07:11:18Z
出版者: 中華民國物理學會
摘要: This study involved depositing back contacts of molybdenum (Mo) thin film for Cu (In,Ga)Se2 (CIGS) solar cells on soda-lime glass substrates via DC magnetron sputtering, investigating the microstructural, mechanical, and optoelectronic properties of the deposited Mo films as a function of the substrate temperature T(subscript sub). The experimental results show that the interface adhesion strength between the glass substrate and the Mo film increases in conjunction with T(subscript sub). The best adhesion strength was obtained at over 25MPa, and the root mean square of the surface roughness has the lowest value of 1.0 nm. The Mo contacts deposited at T(subscript sub) over 200◦C had an average optical reflectivity as high as 57.4% within the wavelength range from 400 nm to 1200nm. When T(subscript sub) equals 250◦C under a working pressure of 0.39Pa, the Mo film has the lowest resistivity of 1:1 × 10^−5 Ωcm.
關聯: Chinese Journal Physics, 50(1): 84-90
顯示於類別:[機電工程學系] 期刊論文


檔案 大小格式瀏覽次數



DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - 回饋