National Changhua University of Education Institutional Repository : Item 987654321/12290
English  |  正體中文  |  简体中文  |  全文筆數/總筆數 : 6507/11669
造訪人次 : 29963440      線上人數 : 462
RC Version 3.2 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
搜尋範圍 進階搜尋

請使用永久網址來引用或連結此文件: http://ir.ncue.edu.tw/ir/handle/987654321/12290

題名: Surface textured molybdenum doped zinc oxide thin films prepared for thin film solar cells using pulsed direct current magnetron sputtering
作者: Lin, Yi- Cheng;Wang, B. L.;Yen, W. T.;Shen, C. H.
貢獻者: 機電工程系
關鍵詞: Molybdenum doped zinc oxide;Surface textured;Light trapping structure;Haze value;Pulsed direct current magnetron sputtering
日期: 2011-06
上傳時間: 2012-07-05T07:11:29Z
出版者: Elsevier B.V.
摘要: In this study, we examined the effect of etching on the electrical properties, transmittance, and scattering of visible light in molybdenum doped zinc oxide, ZnO:Mo (MZO) thin films prepared by pulsed direct current magnetron sputtering. We used two different etching solutions – KOH and HCl-to alter the surface texture of the MZO thin film so that it could trap light. The experimental results showed that an MZO film with a minimum resistivity of about 8.9 × 10- 4 Ω cm and visible light transitivity of greater than 80% can be obtained without heating at a Mo content of 1.77 wt.%, sputtering power of 100 W, working pressure of 0.4 Pa, pulsed frequency of 10 kHz, and film thickness of 500 nm. To consider the effect of resistivity and optical diffuse transmittance, we performed etching of an 800 nm thick MZO thin film with 0.5 wt.% HCl for 3-6 s at 300 K. Consequently, we obtained a resistivity of 1.74-2.75 × 10- 3 Ω cm, total transmittance at visible light of 67%-73%, diffuse transmittance at visible light of 25.1%-28.4%, haze value of 0.34-0.42, and thin film surface crater diameters of 220-350 nm.
關聯: Thin Solid Films, 519(16): 5571-5576
顯示於類別:[機電工程學系] 期刊論文

文件中的檔案:

檔案 大小格式瀏覽次數
index.html0KbHTML850檢視/開啟


在NCUEIR中所有的資料項目都受到原著作權保護.

 

DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - 回饋