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NCUEIR > College of Engineering > Department of Mechatronics Engineering > Proceedings > Item 987654321/12302

Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/12302

Title:	Electrical and Optical Properties of ZnO:Al Film prepared on Polyethersulfone Substrate by RF Magnetron Sputtering
Authors:	Chen, M. Z.;Lin, Yi- Cheng;Kuo, C. C.
Contributors:	機電工程系
Keywords:	RF magnetron sputtering;Transparent conducting film;AZO thin film;Polyethersulfone
Date:	2005-12
Issue Date:	2012-07-05T07:12:30Z
Publisher:	國立成功大學
Abstract:	This study investigates the process parameter effects on the electrical and optical properties of AZO (ZnO:Al) thin film using radio frequency (RF) magnetron sputtering on flexible PES (polyethersulfone) substrates. The process parameters include RF power, working pressure and substrate bias. Results show that RF power was increased to promote the crystalline quality and decrease AZO thin film resistivity. However, when the RF power was increased to 200W the AZO thin film crystalline quality and conductivity became worse. Along with the working pressure increase, regarding the AZO thin film crystalline quality, conductivity and transmittance has the promotion. Substrate bias added has not help to increases crystalline quality, electrical and optical properties of film. At a 150WRF power, 670MPa working pressure and substrate bias 0V, the AZO thin film with a better electrical resistivity of 1.51×10−2 cm and an average optical transmittance of above 90% in the visible region is obtained.
Relation:	2005 OPT 2005台灣光電科技研討會 , 國立成功大學, 2005年12月9-10日
Appears in Collections:	[Department of Mechatronics Engineering] Proceedings

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