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Please use this identifier to cite or link to this item:
http://ir.ncue.edu.tw/ir/handle/987654321/12312
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| Title: | Analysis and experiment of diaphragm deflection by a shear mode PZT actuator in microfluidic application |
| Authors: | Chen, Shih-Chang;Cheng, Chiang-Ho;Lin, Yi- Cheng |
| Contributors: | 機電工程系 |
| Date: | 2006-01
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| Issue Date: | 2012-07-05T07:14:08Z
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| Publisher: | IEEE |
| Abstract: | A novel actuating design that uses the shear deformation of a lead zirconate titanate (PZT) actuator to deflect the diaphragm is proposed and applied to the microfluidic system. The analytical close-form solutions for the deflection and sweep volume of the diaphragm without fluid load are derived. The results are compared with numerical solutions and verified by experiments, which reveals acceptable agreement. The application of this design is realized in a micropump or a microdroplet ejector |
| Relation: | The 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istambul, Turkey, January 22-26, 2006 |
| Appears in Collections: | [機電工程學系] 會議論文
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