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NCUEIR > College of Technology > Department of Industrial Education and Technology > Proceedings > Item 987654321/13769

Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/13769

Title:	SOI Process and Stability Measurements of SCS Scanning Micromirror
Authors:	Chen, Tzung-Ming;Brunne, J.;Wallrabe, U.
Contributors:	工業教育與技術學系
Date:	2011-06
Issue Date:	2012-08-27T10:53:20Z
Relation:	The 9th International Workshop on HARMST (HARMST 2011), Hsinchu, Taiwan, June 12-18, 2011: 131-132
Appears in Collections:	[Department of Industrial Education and Technology] Proceedings

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