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Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/13771

Title: Compliant Scanning Micromirror Actuated with a Displacement Amplification Mechanism
Authors: Chen, Tzung-Ming;Schneider, F.;Wallrabe, U.
Contributors: 工業教育與技術學系
Date: 2010-08
Issue Date: 2012-08-27T10:53:27Z
Publisher: IEEE
Abstract: We present the performance of a piezo-actuated compliant micromirror made of single crystal silicon, which is assembled with a compliant displacement amplification mechanism made of copper. Both of those two parts are purely based on the elasticity and deformation of thin beams. The measurement results reveal that our optical device achieves the specified function as a linear optical scanner, and that the kinetic motion and out-of-plane bending are under control.
Relation: Proceedings of IEEE Optical MEMS & Nanophotonics 2010 International Conference (Optical MEMS 2010), Sapporo, Japan, August 8-12, 2010: 127-128
Appears in Collections:[工業教育與技術學系] 會議論文

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