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題名: Compliant Scanning Micromirror Actuated with a Displacement Amplification Mechanism
作者: Chen, Tzung-Ming;Schneider, F.;Wallrabe, U.
貢獻者: 工業教育與技術學系
日期: 2010-08
上傳時間: 2012-08-27T10:53:27Z
出版者: IEEE
摘要: We present the performance of a piezo-actuated compliant micromirror made of single crystal silicon, which is assembled with a compliant displacement amplification mechanism made of copper. Both of those two parts are purely based on the elasticity and deformation of thin beams. The measurement results reveal that our optical device achieves the specified function as a linear optical scanner, and that the kinetic motion and out-of-plane bending are under control.
關聯: Proceedings of IEEE Optical MEMS & Nanophotonics 2010 International Conference (Optical MEMS 2010), Sapporo, Japan, August 8-12, 2010: 127-128
顯示於類別:[工業教育與技術學系] 會議論文

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