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題名: Influence of Indium Doping on AlGaAs Layers Grown by Molecular Beam Epitaxy
作者: Chang, K. H.;Lee, C. P.;Wu, Jenq-Shinn;Liu, D. G.;Liou, D. C.
貢獻者: 電子工程學系
日期: 1990-10
上傳時間: 2012-09-10T02:32:50Z
出版者: American Institute of Physics
摘要: Influence of indium doping on the qualities of AlGaAs layers grown by molecular beam epitaxy has been studied. It was found that a proper amount of In doping can increase the photoluminescence intensity drastically by a factor greater than 10 indicating an improvement in the optical quality of AlGaAs epilayers. The improvement in the material quality is attributed to a higher surface migration rate of In atoms than those of Ga and Al atoms leading to a reduction of group III vacancies. However, too great a concentration of In atoms leads to effects that may degrade the film quality.
關聯: Appl. Phys. Lett., 57(16): 1640-1642
顯示於類別:[電子工程學系] 期刊論文


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