English  |  正體中文  |  简体中文  |  Items with full text/Total items : 6491/11663
Visitors : 25210991      Online Users : 103
RC Version 3.2 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
Scope Adv. Search

Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/1582

Title: "A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin Film Actuators"
Authors: C. Lee;F. Hsiao;T. Kobayashi;K. H. Koh;P. V. Ramana;W. Xiang;B. Yang;C. W. Tan;D. Pinjala
Contributors: 光電科技研究所
Date: 2009
Issue Date: 2010-11-10T07:35:06Z
Abstract: A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-mum PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.
Relation: IEEE J. Sel. Top. Quant., Vol. 15, No.5 pp.1529
Appears in Collections:[光電科技研究所] 期刊論文

Files in This Item:

There are no files associated with this item.

All items in NCUEIR are protected by copyright, with all rights reserved.


DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - Feedback