National Changhua University of Education Institutional Repository : Item 987654321/1584
English  |  正體中文  |  简体中文  |  全文筆數/總筆數 : 6507/11669
造訪人次 : 30035012      線上人數 : 617
RC Version 3.2 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
搜尋範圍 進階搜尋

請使用永久網址來引用或連結此文件: http://ir.ncue.edu.tw/ir/handle/987654321/1584

題名: “Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors,”
作者: T. T. Mai;F. L. Hsiao;W. Xiang;C. Lee;C. C. Chen;W. K. Choi
貢獻者: 光電科技研究所
關鍵詞: MEMS
NEMS
Photonic crystal resonator
Nano-ring
Nanomechanical sensor
Microcantilever
日期: 2009
上傳時間: 2010-11-10T07:38:04Z
摘要: Microcantilever sensors have been known as a fundamental design used in force sensors, strain sensors and biochemical sensors. The fast-growing applications in nanoelectromechanical systems (NEMS) lead to strong demands in new sensing mechanism in order to downsize the sensing elements to nanometer scale. Photonic crystal (PC) based resonators have been investigated as promising solutions because the bandgap structure and resonator characteristics are extremely sensitive to the deformation and position shift of holes in PC resonators. In addition to the well-known nano-cavity resonator (NCR), we proposed hexagonal nano-ring resonators (NRR) of two different layout configurations. When a microcantilever under different force loads, both of the resonant wavelength and the resonant wavelength shift can be measured as a linear function of force load. The linear relationship between wavelength shifts and strain is observed as well. The minimum detectable force and detectable strain for NRR configuration 1 is derived as small as 0.0757 μN and 0.0023%. The outstanding sensing capability renders PC resonators as a promising nanomechanical sensing element to be integrated in various transducers for NEMS applications.
關聯: accepted by Sensors and Actuators A
顯示於類別:[光電科技研究所] 期刊論文

文件中的檔案:

沒有與此文件相關的檔案.



在NCUEIR中所有的資料項目都受到原著作權保護.

 

DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - 回饋