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Title: “A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators,”
Authors: K. H. Koh;T. Kobayashi;Fu-Li Hsiao;C. Lee
Contributors: 光電科技研究所
Date: 2009
Issue Date: 2010-11-10T07:59:09Z
Relation: Eurosensors ’09, Lausanne, Switzerland, Sept. 6-9
Appears in Collections:[Graduate Institute of Photonics Technologies] Proceedings

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