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Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/1719

Title: Optical Design and Signal Processing for a Microcrack Detection System
Authors: Wen-Ren Yang
Yu-Lin Li
Contributors: 電機工程學系
Keywords: Microcrack
Date: 2010
Issue Date: 2010-11-12T06:56:07Z
Abstract: This paper presents optical design, proof-of-principle experiments, and post-signal processing for a wafer microcrack detection system. Cylindrical lens and Solid Immersion Lens (SIL) are used for the optical module. Near-field probe array is also investigated for future implementation. For post-signal processing, Probabilistic Neural Network (PNN) is used in order to identify vibration-induced deviation. Derived Short-Time Discrete Wavelet Transform (STDWT) is developed in order to identify microcrack.
Relation: 2010 5th IEEE Conference on Industrial Electronics and Applicationsis, June 15-17, 2010:1780-1785
Appears in Collections:[電機工程學系] 會議論文

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