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http://ir.ncue.edu.tw/ir/handle/987654321/1719
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題名: | Optical Design and Signal Processing for a Microcrack Detection System |
作者: | Wen-Ren Yang Yu-Lin Li |
貢獻者: | 電機工程學系 |
關鍵詞: | Microcrack PNN STDWT |
日期: | 2010
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上傳時間: | 2010-11-12T06:56:07Z
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摘要: | This paper presents optical design, proof-of-principle experiments, and post-signal processing for a wafer microcrack detection system. Cylindrical lens and Solid Immersion Lens (SIL) are used for the optical module. Near-field probe array is also investigated for future implementation. For post-signal processing, Probabilistic Neural Network (PNN) is used in order to identify vibration-induced deviation. Derived Short-Time Discrete Wavelet Transform (STDWT) is developed in order to identify microcrack. |
關聯: | 2010 5th IEEE Conference on Industrial Electronics and Applicationsis, June 15-17, 2010:1780-1785 |
顯示於類別: | [電機工程學系] 會議論文
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