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題名: Optical Design and Signal Processing for a Microcrack Detection System
作者: Wen-Ren Yang
Yu-Lin Li
貢獻者: 電機工程學系
關鍵詞: Microcrack
日期: 2010
上傳時間: 2010-11-12T06:56:07Z
摘要: This paper presents optical design, proof-of-principle experiments, and post-signal processing for a wafer microcrack detection system. Cylindrical lens and Solid Immersion Lens (SIL) are used for the optical module. Near-field probe array is also investigated for future implementation. For post-signal processing, Probabilistic Neural Network (PNN) is used in order to identify vibration-induced deviation. Derived Short-Time Discrete Wavelet Transform (STDWT) is developed in order to identify microcrack.
關聯: 2010 5th IEEE Conference on Industrial Electronics and Applicationsis, June 15-17, 2010:1780-1785
顯示於類別:[電機工程學系] 會議論文


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