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Title: Effects of KrF Excimer Laser Irradiation on Surface Work Function of Indium-tin-oxide
Authors: Lin, Yow-Jon;Chen, Yao-Ming;Wang, Yung-Chi
Contributors: 光電科技研究所
Keywords: Indium compounds;Tin compounds;Laser beam effects;Work function;Carrier density;Vacancies (crystal);Chemical analysis;Surface composition;X-ray photoelectron spectra
Date: 2005-04
Issue Date: 2013-10-02T08:36:19Z
Publisher: American Institute of Physics
Abstract: In this study, the effects of a KrF excimer laser irradiation on the surface work function (SWF) of indium-tin-oxide (ITO) have been investigated. From the observed x-ray photoelectron spectroscopy results, optical transmittance measurements, and four-point probe measurements, it is suggested that the surface chemical changes, the reduction of the carrier concentration, and an increase in the sheet resistance had strong effects on the SWF of ITO. We find that the (O2)2− occupation of oxygen vacancies (VO2+) near the ITO surface after laser irradiation induced a peroxidic ITO surface, increasing the SWF.
Relation: Journal of Applied Physics, 97(8): 083702
Appears in Collections:[光電科技研究所] 期刊論文

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