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Title: Nonalloyed Ohmic Contact Formation in Ti/Al Contacts to n-type AlGaN
Authors: Lin, Yow-Jon;Chien, Feng-Tso;Lee, Ching-Ting;Lin, Chi-Shin;Liu, Yang-Chun
Contributors: 光電科技研究所
Keywords: Condensed matter: electrical, magnetic and optical;Surfaces, interfaces and thin films;Condensed matter: structural, mechanical & thermal;Nanoscale science and low-D systems
Date: 2008-08
Issue Date: 2013-10-02T08:37:03Z
Publisher: IOP Publishing Ltd
Abstract: Nonalloyed ohmic contact formation in Ti/Al contacts to n-type AlGaN (n-AlGaN) was achieved in this study. The surface chemistry and electrical properties of n-AlGaN surfaces were studied via x-ray photoelectron spectroscopy before and after oxidation and wet chemical treatments. The authors found that changes in the contact resistance are dominated by changes in the Al mole fraction and the interface states. Oxidation and HF and (NH4)2Sx treatments on n-AlGaN led to an increase in the electron affinity (due to a reduction in the Al content at the n-AlGaN surface) and a reduction in the surface band bending (due to more N vacancies and N vacancies being occupied by S (i.e. donor-like states) than Al vacancies and Ga vacancies (i.e. acceptor-like states) near the n-AlGaN surface region), leading to the nonalloyed ohmic contact formation for the Al/Ti/n-AlGaN sample.
Relation: Journal of Physics D: Applied Physics, 41(17): 175105
Appears in Collections:[Graduate Institute of Photonics Technologies] Periodical Articles

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