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| 題名: | Sol-Gel-Derived Zn(1-x)MgxO Thin Films Used as Active Channel Layer of Thin-Film Transistors |
| 作者: | Lee, Jen-Hao;Lin, Pang;Lee, Cheng-Chung;Ho, Jia-Chong;Wang, Yu-Wu |
| 貢獻者: | 光電科技研究所 |
| 關鍵詞: | Zn�1 x�Mgx O;Thin films;TFT;Sol gel;Donor level |
| 日期: | 2005
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| 上傳時間: | 2013-12-30T09:46:00Z
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| 出版者: | The Japan Society of Applied Physics |
| 摘要: | Sol-gel derived n-type Zn(1-x)MgxO (x=0-0.45) thin films and thin-film transistors (TFTs) with active channel layers made of the films were investigated. The films were prepared at 500.DEG.C.. The effects of Mg doping on the crystallinity, optical transparency, grain size, and charge-carrier concentration (n) of the films were examined. The Fermi level of the films, as derived from the temperature dependence of n, was -0.12 eV below the conduction band. The donor concentration and donor level (Ed) were derived by a curve fitting method based on the electrical neutrality condition. Ed was found to be -0.3 eV below the conduction band. The composition dependence of the TFT output characteristics was interpreted and correlated to the width of the depletion region adjacent to the grain boundaries. When the grains were almost depleted at x=0.2, the TFT showed an enhancement mode and an on/off ratio of 10'6'. |
| 關聯: | Japanese Journal of Applied Physics, 44(7A): 4784-4789 |
| 顯示於類別: | [光電科技研究所] 期刊論文
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