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Title: Structural Optimization and Fabrication of a Compliant Micro-Rotational Mirror
Authors: T. Chen;Z. Liu;J. G. Korvink;U. Wallrabe
Contributors: 工業教育與技術學系
Date: 2008
Issue Date: 2010-11-15T07:14:59Z
Relation: Technical Digest of 19th MicroMechanics Europe Workshop (MME 2008), 373-376
Appears in Collections:[Department of Industrial Education and Technology] Proceedings

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