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請使用永久網址來引用或連結此文件: http://ir.ncue.edu.tw/ir/handle/987654321/1843

題名: Topology Optimization for Micro Rotational Mirror Design and Safe Manufacturing
作者: T. Chen;Z. Liu;J. G. Korvink;S. Krausse;U. Wallrabe
貢獻者: 工業教育與技術學系
日期: 2009
上傳時間: 2010-11-15T07:16:29Z
摘要: We present a new design procedure for a functional MEMS design and, simultaneously, for safe manufacturing. In order to verify our approach we chose a 2.5 D compliant rotational mirror as an example, which is fabricated in single crystal silicon. The design of this compliant mechanism is based on structural topology optimization with subsequent modification by parameter optimization with a pseudo-rigid-body mode analysis. The fabricated compliant mechanism has a linear input at the load point, which is pushed by a piezoelectric actuator, and a rotational output at the mirror section. This single crystal silicon mechanism achieves a rotational angle of 5deg with a stationary rotational center at low frequency up to 50 Hz.
關聯: Proc. 22nd IEEE MEMS Conference, 1019-1022
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