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Title: 12° Design Rule for Single Crystal Silicon Curved Beam Compliant Mechanisms with Large Deformation
Authors: Chen, T.;Krausse, S.;Korvink, J. G.;Wallrabe, U.
Contributors: 工業教育與技術學系
Date: 2010
Issue Date: 2010-11-15T07:17:48Z
Abstract: We present a new 12° design rule to enhance the reliability of single crystal silicon (SCS) compliant mechanism with large deformation. This rule defines a suitable structure orientation on an SCS wafer and avoids failure of stress induced crystal slip on curved compliant beams. Our rule considers the crystalline directional properties, such as Young's Modulus and fracture strength, of SCS. We fabricated a rotational mirror as demonstrator which was displaced by a piezoelectric actuator. Obeying to the 12° design rule we achieved a 100% larger rotational angle at the mirror section than in case of arbitrary orientation.
Relation: Proc. 23rd IEEE MEMS Conference, 552-555 (10.1109/MEMSYS.2010.5442442)
Appears in Collections:[Department of Industrial Education and Technology] Proceedings

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