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題名: New Technique for Fabrication of Individual Carbon-Nanotube Field Emitters
作者: Lee, Ming-Way;Chen, Yu-Shen;Lai, Wei-Ciao;Suen, Yuen-Wu;Wu, Jong-Ching
貢獻者: 物理學系
關鍵詞: Field emission;Carbon nanotube;Individual;Enhancement factor
日期: 2007-01
上傳時間: 2014-06-06T07:18:41Z
出版者: The Japan Society of Applied Physics
摘要: Currently, field emission experiments on individual carbon nanotubes (CNTs) are carried out by placing the CNTs inside a transmission electron microscope. In this work we report an alternative method of fabricating and measuring individual multiwalled CNT-field emitters fabricated on a silicon substrate by the e-beam lithography technique. A field emission experiment is then performed in a high-vacuum system for CNTs with various radii, lengths, interelectrode separations and tip structures. The geometrical enhancement factors .BETA. exhibit three ranges: low (.BETA.-10), medium (.BETA.-100) and high (.BETA.>200) depending on whether the CNT tip is closed-tipped, open-tipped with a flat end or open-tipped with an oblique-angle end, respectively. The turn-on voltage Vto also depends on the tip structure and the lowest Vto occurs in open-tipped-with-oblique-angle CNTs. The geometrical enhancement factor depends on the tube geometry via a linear equation .BETA.=.BETA.0(1+d/kr) with k.IMAGE.40 and .BETA.0 equals 163 and 53 for the high-.BETA. and medium-.BETA. lines, respectively, where r is the radius and d is the CNT tip-anode spacing. The new method may open a path leading to the integration of nanotube field emitters with other miniature devices using semiconductor integrating technology.
關聯: Japanese Journal of Applied Physics, 46(1): 430-433
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