National Changhua University of Education Institutional Repository : Item 987654321/18843
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Title: 中台灣奈米技術科學與工程核心設施計畫---子計畫三:彰師大部分(II)
Authors: 吳仲卿;林義成;洪連輝
Contributors: 物理學系
Keywords: 核心設施;電漿耦合活性離子蝕刻機;高壓反應爐;分子束磊晶機台
Core facilities;Inductively coupled plasma reactive ion etcher;High pressure reactor;Nanofabrication;Molecular beam epitaxy
Date: 2004
Issue Date: 2014-08-06T05:03:46Z
Abstract: 在持續第二年的計畫執行中:(一)我們已完成測試並進行服務之機台兩部;(二)即將馬上進行安裝之儀器設備一部。已完成測試及進行服務的機台為第一年採購之兩件重要的核心設施,該兩件設施分別是用於深蝕刻矽晶片之電漿耦合活性離子蝕刻機及合成二氧化鈦奈米管之具備紅外線光譜分析之高壓反應爐。前者已展示200奈柱狀結構且具20比1的高深寬比能力,此設備之建立不僅加強及補足彰化師大在奈米製程上的能力及研發能量,對於中部微機電(奈米機電)研究專長之同仁提供了預期中相當多的服務。而二氧化鈦奈米管的合成也提供國內多所學校同仁研究之用。
Continuing from the first year of this three-year project, two major achievements have been reached: (1) two pieces of instruments purchased in the first year have been installed and tested, and they have been in service for some time ever since; and (2) one piece of molecular beam epitaxy machine purchased in the second year is to be installed next month. For the two pieces of instruments purchased in the first year they are inductively coupled plasma reactive ion etcher (ICP RIE) for the deep etching of silicon (Alcatel AMS 100SE) and high pressure reactor equipped with FTIR for the synthesis of TiO2 tube, respectively. The former has shown capability of having 200 nm diameter and 4 μm depth of silicon pillar, which plays an important role in the field of MEMS/NEMS and it has served the central community well. Also, the TiO2 tube grower has served nation-wide community with good reputation. As was defined in the joint project, the mission at National Changhua University of Education (NCUE) is focused on the nanofabrication process, in which four pieces of core facilities were proposed to enhance and compensate the fabrication capability existed at NCUE. Therefore, in order to facilitate and speed up the whole process a matching fund for over 50 % of the funded budget was put into this project for the first, namely extra 3.7 million NTD from our university (NCUE) was added on the top of the 6.8 million NTD funded from NSC. Furthermore, more matching fund was added in the second year (8 million NTD from our university was added
to the 7.1 million funded from NSC) for purchasing a versatile molecular beam epitaxy machine, which is expected to be installed in June (next month). Based on the progress we have made so far, we believe that a national level of nanofabrication facilities can be established in the near
Relation: 國科會計畫, 計畫編號: NSC93-2120-M018-001; 研究期間: 9308-9407
Appears in Collections:[Department of Physics] NSC Projects

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