National Changhua University of Education Institutional Repository : Item 987654321/18858
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题名: 中台灣奈米科技核心設施服務計畫---彰化師範大學(I)
Infrastructure Project of Nanoscience and Technology Center in Central Taiwan, NCUE(I)
作者: 吳仲卿;黃滿芳;洪連輝;陳偉立;石豫臺
贡献者: 物理學系
关键词: 核心設施;電感耦合反應式離子蝕刻系統;高壓反應爐;分子束磊晶系統;電子迴旋共振式離子濺鍍系統
Core-facilityt;ICP RIE;MBE;Ion Beam Sputtering System
日期: 2009
上传时间: 2014-08-06T05:05:03Z
摘要: 這是第三期(三年計畫)第一年的精簡報告,主要持續之前計畫所採購儀器之正常運作與維護。在第二期內,我們已完成測試四部機台並進行服務;已完成測試及進行服務的機台為第一期採購之重要的核心設施,該設施分別是用於深蝕刻矽晶片之電感耦合反應式離子蝕刻系統、合成二氧化鈦奈米管之具備紅外線光譜分析之高壓反應爐、分子束磊晶系統及電子迴旋共振式離子濺鍍系統。此設備之建立不僅加強及補足彰化師大在奈米製程上的能力及研發能量,對於中部微機電(奈米機電)研究專長之同仁亦提供了相當多的服務。同時以本校校方的重視和支持,我們已具備成一個國家級的奈米製程中心。未來將持續配合各方的研究與需求,發揮機台應有的功能,深化教學、研究與服務。
This is a report for the first year in the third phase of a joint three-year core-facility project. The main task force has been aiming to better support and service the local community since we have installed all the equipments purchased in the first phase of three-year project. Major facilities purchased in the first phase such as ICP RIE, High Pressure Reactive Chamber, MBE, and Ion Beam Sputtering System, are all in good condition. These facilities are not only serving our faculty members in this university but also serving the local community at the central part of Taiwan. Over all speaking we have established a good quality of nanofabrication center in the central part of Taiwan that we will continue to improve the performance of all the equipments and to enhance the education, research and services by these equipments.
關聯: 國科會計畫, 計畫編號: NSC98-2120-M018-001; 研究期間: 9808-9907
显示于类别:[物理學系] 國科會計畫

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