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Items for Author "Chen, Tzung-Ming" 

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[工業教育與技術學系] 會議論文 2010-08 Compliant Scanning Micromirror Actuated with a Displacement Amplification Mechanism Chen, Tzung-Ming; Schneider, F.; Wallrabe, U.
[工業教育與技術學系] 會議論文 2011-06 SOI Process and Stability Measurements of SCS Scanning Micromirror Chen, Tzung-Ming; Brunne, J.; Wallrabe, U.


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