National Changhua University of Education Institutional Repository : Item 987654321/11375
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题名: Micro-optical Components for a MEMS Integrated Display
作者: Wang, Kerwin;Wei, Khye-Suian;Sinclair, Mike;Bohringer, Karl F.
贡献者: 機電工程學系
日期: 2003-12
上传时间: 2012-06-06T01:42:52Z
摘要: This paper summarizes the results from our previously published researches on reflective and transmissive optical switches for MEMS integrated display systems. They include a dual-servoscanning mirror and a transmissive zigzag electrostatic micro-optical switch. It also introduces a new
process for making a microlens array. These are three key components for a MEMS display system.
關聯: The 12th International Workshop on The Physics of Semiconductor Devices (IWPSD), Chennai, India
显示于类别:[機電工程學系] 會議論文

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