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|Title: ||Low Temperature Molding for High Space Coverage Microlens Arrays|
|Authors: ||Wang, Kerwin;Bohringer, Karl F.|
|Issue Date: ||2012-06-06T01:43:13Z
|Abstract: ||This paper presents SF6/O2 plasma lens-mold-etching and low-temperature-molding to produce 100% coverage microlens arrays. The|
methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.
|Relation: ||International Conference on Quantum Electronics/ Pacific Rim Conference on Lasers and Electro-Optics 2005 (IQEC/CLEO-PR), Tokyo, Japan, July 14, 2005|
|Appears in Collections:||[機電工程學系] 會議論文|
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