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Title: Extend The Angular Displacement of A Thermal Actuated Scanning Mirror
Authors: Wang, Kerwin;Cheng, Chien-Min
Contributors: 機電工程學系
Keywords: Scanning micromirror;Thermal actuator
Date: 2008-06
Issue Date: 2012-06-06T01:43:31Z
Publisher: National Cheng Kung University
Abstract: MEMS thermal actuators are known for their relatively high mechanical energy output for a given MEMS chip area, however, they are power consuming. This paper presents two novel actuating methods to achieve large scanning angular displacements with low driving voltage and power consumption. Experimental results show that these two driving methods can amplify the mirror angular displacement. Compared to our previous testing results the scanning angle is improved from 18o to The pulling-up mechanism has reliable performance after 3.6*10/sup 7/ cycles under continuous operation.
Relation: The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, National Cheng Kung University, June 22-25, 2008
Appears in Collections:[Department of Mechatronics Engineering] Proceedings

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