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|Title: ||Using a Canny-Edge-Detection Based Method to Characterize In-plane Micro-Actuators|
|Authors: ||Cheng, Chao-Yu;Lin, Yan-Bo;Wang, Kerwin|
|Keywords: ||Automatic optical inspection;A OJ;Canny edge detection;Actuator, in-plane motion|
|Issue Date: ||2012-06-06T01:44:07Z
|Abstract: ||This paper developed an automatic optical inspection (AOI) technology for characterizing the motion amplitude and the vibration mode shape of in-plane microactuators. The technology involves a multi-stage image process method. It includes an image contrast enhancement step and a|
Canny edge detection method. To evaluate this approach, a rotational electrostatic actuator has been prepared for testing. This actuator performed low contrast optical micrographs under first vibration mode. The testing result shows that the technology can handle low contrast microscopic images quite well. The suggested method successfully provides quantitative information to identify the vibration amplitudes and mode shape of the tested actuator with a space resolution of 0.46IlmipixeI.
|Relation: ||The 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Kyoto, Japan, March 5-8, 2012|
|Appears in Collections:||[機電工程學系] 會議論文|
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