National Changhua University of Education Institutional Repository : Item 987654321/11942

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NCUEIR > College of Engineering > Department and Graduate Institute of Electronic Engineering > Proceedings > Item 987654321/11942

Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/11942

Title:	Fiber Laser Driven EUV Generation
Authors:	Chang, Yu-Chung;Aghapi Mordovanakis;Hou, Kai-Chung;John Nees;Bixue Hou;Anatoly Maksimchuk;Gerard Mourou;Almantas Galvanauskas
Contributors:	電機工程學系
Date:	2005-05
Issue Date:	2012-07-03T01:49:58Z
Publisher:	Optical Society of America
Abstract:	Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.
Relation:	Conference on Lasers and Electro-Optics (CLEO), May 22, 2005
Appears in Collections:	[Department and Graduate Institute of Electronic Engineering] Proceedings

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