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Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/12322

Title: 中部科學園區推動計畫---微機電與半導體晶片之精密定位系統
A Precision Positioning System for MENS and Semiconductor Chips
Authors: 陳明飛;王宜明;吳孟軍;林義成;黃宜正
Contributors: 機電工程系
Date: 2003-12
Issue Date: 2012-07-05T07:22:03Z
Publisher: 行政院國家科學委員會
Relation: 計畫編號:NSC91-2218-E018-005; 研究期間:2002/12-2003/12
Appears in Collections:[機電工程學系] 國科會計畫

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