National Changhua University of Education Institutional Repository : Item 987654321/12322

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NCUEIR > College of Engineering > Department of Mechatronics Engineering > NSC Projects > Item 987654321/12322

Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/12322

Title:	中部科學園區推動計畫---微機電與半導體晶片之精密定位系統 A Precision Positioning System for MENS and Semiconductor Chips
Authors:	陳明飛;王宜明;吳孟軍;林義成;黃宜正
Contributors:	機電工程系
Date:	2003-12
Issue Date:	2012-07-05T07:22:03Z
Publisher:	行政院國家科學委員會
Relation:	計畫編號:NSC91-2218-E018-005; 研究期間:2002/12-2003/12
Appears in Collections:	[Department of Mechatronics Engineering] NSC Projects

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