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Please use this identifier to cite or link to this item: http://ir.ncue.edu.tw/ir/handle/987654321/13769

Title: SOI Process and Stability Measurements of SCS Scanning Micromirror
Authors: Chen, Tzung-Ming;Brunne, J.;Wallrabe, U.
Contributors: 工業教育與技術學系
Date: 2011-06
Issue Date: 2012-08-27T10:53:20Z
Relation: The 9th International Workshop on HARMST (HARMST 2011), Hsinchu, Taiwan, June 12-18, 2011: 131-132
Appears in Collections:[工業教育與技術學系] 會議論文

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